May 1-5, 2011
A lab scale internally circulating fluidized bed (ICFB) with a centrally located draft tube was designed to make polysilicon from trichlorosilane. Experimental results and evaluations showed that particle circulation could carry enough heat for reaction and effectively decrease wall deposition. Well grown granular polysilicon was obtained in a stable fluidization state and particle circulation rate.
Chenjing Wang, Tiefeng Wang, and Zhanwen Wang, "Manufacture of Granular Polysilicon from Trichlorosilane in an Internally Circulating Fluidized Bed Reactor" in "10th International Conference on Circulating Fluidized Beds and Fluidization Technology - CFB-10", T. Knowlton, PSRI Eds, ECI Symposium Series, (2013). http://dc.engconfintl.org/cfb10/14