Advances in large PECVD processing technology up to Gen 11 for TFT LCD and OLED
May 21-25, 2017
Recent surging demands for larger (>50”) TVs rapidly driving display processing technologies toward bigger substrate sizes up to 10m2 range. Meanwhile, high performance displays (OLED TV, iPad, iMac and 4K monitors…) have stretched a-Si mobility (85% LCD TVs in the world, supported recent starting of over a dozen largest TV factories worldwide Gen 8.5 and above, in particular enabled >95% of advanced IGZO metal-oxide TFT display products including all latest OLED TVs, Apple iPads, iMac 5K or 4K displays, Microsoft Surface Pro 4, as well as major brand 4K or 8K monitors.
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Yi Cui, Beom Soo Park, Gaku Furuta, Jinhyun Cho, Soo Young Choi, Robin Tiner, Allen Lau, and Suhail Anwar, "Advances in large PECVD processing technology up to Gen 11 for TFT LCD and OLED" in "International Conference on Semiconductor Technology for Ultra-Large Scale Integrated Circuits and Thin Film Transistors VI (ULSIC vs TFT 6)", Yue Kuo (Texas A&M University, USA) Olivier Bonnaud (University of Rennes I, France) Eds, ECI Symposium Series, (2017). http://dc.engconfintl.org/ulsic_tft_6/12
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