Two-terminal vertical thyristor-based capacitorless memory cells using latch-up features
May 21-25, 2017
Conventional dynamic random access memory (DRAM) has been facing a severe challenge to scale down the capacitor because the cell capacitor should be able to store sufficient charges of 25~30 fF/cell. Many kinds of emerging devices have been proposed to overcome this challenge coming from capacitor; i.e., ReRAM, CBRAM, PRAM, and STT-MRAM. However, the vertical thyristor based two-terminal capacitorless memory is a candidate to replace current DRAM, which consists of only one p++n+p+n++ vertical structure diode using conventional Si technology. The two-terminal vertical thyristor based capacitorless memory cell having p++(anode)n+(n-base)p+(p-base)n++(cathode) structure is easily able to construct cross-point memory array-cells, as shown in Figure 1. It utilizes latch-up characteristics showing bi-stable current-voltage (I-V) characteristics, which are generated by n+p+ base region under an applied bias. However, the demonstration of the device has not been successfully performed yet because of its difficult device fabrication process (i.e., dopant fluctuation at the p/n junction interface, presence of dislocations & stacking faults depending on dopant concentration). In our study, the dependency of the latch-up characteristics (i.e., bi-stability, Ion/Ioff ratio) on dopant concentration and thickness of n+p+ base were investigated by performing simulations, as shown in Figure 2. I-V characteristics in Fig. 2 exhibited that latch-up voltage increased with the dopant concentration of n+p+ base, while the latch-up characteristic was not established at dopant concentration of 1 x 1017 cm-3. It was confirmed that the latch-up voltage increasing with dopant concentration of n+p+ base region was associated with the hole and electron diffusion barrier in n+p+ base region. In addition, the latch-up voltage was in detail investigated as a function of the n+(n-base)p+(p-base) concentration independently. Furthermore, we will review the device physics of this memory cell and demonstrate memory cell operation.
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Min-Won Kim, Tae-Hun Shim, Seung-Hyun Song, Sang-Dong Yoo, and Jea-Gun Park, "Two-terminal vertical thyristor-based capacitorless memory cells using latch-up features" in "International Conference on Semiconductor Technology for Ultra-Large Scale Integrated Circuits and Thin Film Transistors VI (ULSIC vs TFT 6)", Yue Kuo (Texas A&M University, USA) Olivier Bonnaud (University of Rennes I, France) Eds, ECI Symposium Series, (2017). http://dc.engconfintl.org/ulsic_tft_6/6