In situ nanocompression tests in an environmental TEM to study plasticity of cerium oxides
September 29-October 4, 2019
Cerium oxide plays an important role in several fields, among which catalysis, gas detection or fuel cells . Cerium oxide nanoparticles are also used as superior abrasive particles in chemical mechanical planarization (CMP), which is a key process in semiconductor device fabrication . Most of the current research focus on the synthesis of cerium oxide to optimize CMP, but analysing its deformation mechanisms is also a promising research direction .
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Rongrong Zhang, Lucile Joly-Pottuz, Thierry Epicier, Manuel Cobian, Tristan Albaret, Douglas D. Stauffer, and Karine Masenelli-Varlot, "In situ nanocompression tests in an environmental TEM to study plasticity of cerium oxides" in "Nanomechanical Testing in Materials Research and Development VII", Jon Molina-Aldareguia, IMDEA-Materials Institute, Spain Eds, ECI Symposium Series, (2019). https://dc.engconfintl.org/nanochemtest_vii/11