In situ nanocompression tests in an environmental TEM to study plasticity of cerium oxides

Conference Dates

September 29-October 4, 2019


Cerium oxide plays an important role in several fields, among which catalysis, gas detection or fuel cells [1]. Cerium oxide nanoparticles are also used as superior abrasive particles in chemical mechanical planarization (CMP), which is a key process in semiconductor device fabrication [2]. Most of the current research focus on the synthesis of cerium oxide to optimize CMP, but analysing its deformation mechanisms is also a promising research direction [3].

Please click Additional Files below to see the full abstract.

135.pdf (480 kB)

This document is currently not available here.