Gallium-free micromechanical sample preparation from ECAPed alluminium

Conference Dates

September 29-October 4, 2019


Focused ion beam scanning electron microscopes (FIB-SEM) enable high precision site-specific material removal with practically no restriction on sample composition. Depending on the ion source (e.g. Ga+, Xe+), the rate of material removal differs significantly. In general, the design of Xe+ source allows using high ion beam currents that can be up to a few µA while maintaining beam quality and performance. However, the most relevant feature of Xe ions for this study is their non-metallic and inert nature which prevents any chemical interaction with the target material and formation of unwanted metallic compounds that alter the original properties of the sample that is being analyzed.

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