Title
On the effects of microstructural orientation on fracture toughness in (V,Al)-nitride and -oxynitride thin films
Conference Dates
October 2 – 7, 2022
Abstract
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Recommended Citation
Markus Reiner Schoof, Soheil Karimi Aghda, Marcus Hans, Carl F. Kusche, Sandra Korte-Kerzel, Jochen M. Schneider, and James S. K.-L. Gibson, "On the effects of microstructural orientation on fracture toughness in (V,Al)-nitride and -oxynitride thin films" in "Nanomechanical Testing in Materials Research and Development VIII", Sandra Korte-Kerzel, RWTH Aachen University, Germany Eds, ECI Symposium Series, (2022). https://dc.engconfintl.org/nanomechtest_viii/46
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