Gravimetric and biological sensors based on SAW and FBAR technologies
May 21-25, 2017
This presentation will describe the development of Gravimetric and Biological Sensors based on SAW and FBAR Technologies. The SAW devices were fabricated on polycrystalline ZnO thin films deposited using both standard R.F. sputtering techniques and a novel High Target Utilisation Sputtering System (HiTUS). This system ensures that we can produce the low stress films at the high deposition rates necessary for such structures to operate efficiently. However in order to further improve the sensitivity of our sensors we have also investigated the use of Thin Film Bulk Acoustic Resonators (FBARs) . We will describe standard gravimetric sensors based on such material and also gravimetric sensors for use in liquid environments through the use of inclined c-axis ZnO material. The talk will conclude with a discussion of dual mode thin film FBARs for parallel sensing of both mass loading and temperature.
William Milne, Girish Rughoobur, I. Miele, A .J. Flewitt, Mario de Miguel Ramos, T. Mirea, M. Clement, J. Olivares, B. Diaz-Duran, J. Sangrador, and E. Iborra, "Gravimetric and biological sensors based on SAW and FBAR technologies" in "Semiconductor Technology for Ultra-Large Scale Integrated Circuits and Thin Film Transistors VI (ULSIC vs TFT 6)", Yue Kuo (Texas A&M University, USA) Olivier Bonnaud (University of Rennes I, France) Eds, ECI Symposium Series, (2017). https://dc.engconfintl.org/ulsic_tft_6/37