Conference Dates
May 13-17, 2007
Abstract
A comprehensive multiphase gas-solid mathematical model that successfully describes the batch growth of silicon particles in a chemical vapor deposition (CVD) submerged spouted bed reactor is extended to simulate semi-batch operations with periodic seeds additions and product extractions. This model takes into account the fluidized bed reactor as well as a population balance equation representing particle growth and agglomeration. Experimental data obtained from semi-batch operation in a pilot scale reactor at REC Silicon Inc. are used to evaluate the proposed mathematical model.
Recommended Citation
Juliana Piña, Verónica Bucalá, Susana N. Schbib, Paul Ege, and Hugo Ignacio de Lasa, "Simulation of a Silicon CVD Spouted Fluidized Bed Reactor: Semi-Batch Operations" in "The 12th International Conference on Fluidization - New Horizons in Fluidization Engineering", Franco Berruti, The University of Western Ontario, London, Canada; Xiaotao (Tony) Bi, The University of British Columbia, Vancouver, Canada; Todd Pugsley, University of Saskatchewan, Saskatoon, Saskatchewan, Canada Eds, ECI Symposium Series, (2007). https://dc.engconfintl.org/fluidization_xii/69