Title
Measurement of Young’s modulus of thin SmS films by Nanoindentation and surface acoustic wave
Conference Dates
September 29-October 4, 2019
Abstract
Nanoindentation was used to measure the elastic modulus of thin semiconducting form of Samarium Sulphide (SmS) thin films with nominal thickness of 100 nm, 200 nm and 400 nm on silicon substrate at different loads.
The indentation results are fitted with modified King’s model [1] to exclude the effect of substrate, of which the Young’s moduli of films are consistent with measurement from Laser Surface Acoustic Wave system (LaWave) and calculated results from literature [2].
[1] [1] R. Saha, W. D. Nix, Acta Mater. 50 (2002) 23.
[2] E. G. Soboleva et al, Appl. Mech. Mater. 770 (2015) 137; V. V. Kaminskiy et al, Sol. Sys. Res., 48 (2014) 561.
Recommended Citation
Francois De-Luca, Huixing Zhang, Mark Stewart, Ivan Rungger, Philippe Smet, Andreas Sousanis, Dirk Poelman, and Mark Gee, "Measurement of Young’s modulus of thin SmS films by Nanoindentation and surface acoustic wave" in "Nanomechanical Testing in Materials Research and Development VII", Jon Molina-Aldareguia, IMDEA-Materials Institute, Spain Eds, ECI Symposium Series, (2019). https://dc.engconfintl.org/nanochemtest_vii/2