Assessment of nanomechanical properties and residual stresses in multilayer TIW-Au-TIW thin films of MEMS micro-structure

Authors

• Saqib Rashid, Roma Tre University, Dept.t of Civil, Computer and Aeronautical Engineering, Rome, ItalyFollow
• Rossi E., Department of Civil, Computer Science and Aeronautical Technologies Engineering, University of Roma Tre, Rome; National Interuniversity Consortium of Materials Science and Technology (INSTM), Italy
• Sebastiani M, Department of Civil, Computer Science and Aeronautical Technologies Engineering, University of Roma Tre, Rome; National Interuniversity Consortium of Materials Science and Technology (INSTM), Ital

Conference Dates

October 6-11, 2024

Abstract

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Recommended Citation

Saqib Rashid, Rossi E., and Sebastiani M, "Assessment of nanomechanical properties and residual stresses in multilayer TIW-Au-TIW thin films of MEMS micro-structure" in "Nanomechanical Testing in Materials Research and Development IX", Marco Sebastiani, Universita degli studi Roma Tre, Italy Eds, ECI Symposium Series, (2024). https://dc.engconfintl.org/nanomechtest_ix/26