Deformation of silicon oxides under electron-beam irradiation and its atomistic mechanisms

Authors

• Sung-Gyu Kang, Gyeongsang National University, KoreaFollow
• Heung Nam Han, Seoul National University
• In-Suk Choi, Seoul National University

Conference Dates

October 6-11, 2024

Abstract

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Recommended Citation

Sung-Gyu Kang, Heung Nam Han, and In-Suk Choi, "Deformation of silicon oxides under electron-beam irradiation and its atomistic mechanisms" in "Nanomechanical Testing in Materials Research and Development IX", Marco Sebastiani, Universita degli studi Roma Tre, Italy Eds, ECI Symposium Series, (2024). https://dc.engconfintl.org/nanomechtest_ix/34