Microsystems for thermal energy powering
May 19-23, 2019
Flexible thermoelectric micro power generators have been developed for wearable devices such as body area network. Also in order to store the generated power, a micro solid state supercapacitor using thin films composed of graphene nanowall are developed. The flexible thermoelectric micro power generator is fabricated by electrochemical deposition of Bi2Te3 and Sb2Te3, which is embedded by PDMS, as shown in Fig. 1. A power generation of 4 μW/cm2 are demonstrated from human body temperature. In order to improve the power generation performance, nanocomposites of Bi2Te3 and Au nanoparticles are synthesized by co-electrodeposition (Fig. 2). For the fabrication of the solid state micro super capacitor, plasma-enhanced chemical vapor deposition is used to deposit graphene nanowall on a spiral-shaped silicon electrode pattern (Fig. 3). On the graphene nanowall Ru oxide or Ni oxide is deposited for charge storage layer. Areal energy density of ~15 μWh/cm2 and areal power density of ~2.49 mW/cm2 are achieved. Also a wide operation voltage range will allow to the application to energy storage of the thermoelectric power generator.
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Takahito Ono, "Microsystems for thermal energy powering" in "Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors VII", Yue Kuo, Texas A&M University, USA Junichi Murota, Tohoku University, Japan Yukiharu Uraoka, Nara Advanced Institute of Science and Technology, Japan Yasuhiro Fukunaka, Kyoto University, Japan Eds, ECI Symposium Series, (2019). https://dc.engconfintl.org/ulsic_tft_vii/15