Low-temperature HfZrO2 Ferroelectric Thin-Film Transistors with IGZO Channels

Authors

• I-Chun Cheng, National Taiwan UniversityFollow
• Chun-Wei Chang, National Taiwan University
• Sie Beng Ting, National Taiwan University
• Kuan-Chou Buu, National Taiwan University
• Che-Chuan Lee, National Taiwan University

Conference Dates

March 30 - April 3, 2025

Abstract

Please click Additional Files below to see the full abstract

Recommended Citation

I-Chun Cheng, Chun-Wei Chang, Sie Beng Ting, Kuan-Chou Buu, and Che-Chuan Lee, "Low-temperature HfZrO2 Ferroelectric Thin-Film Transistors with IGZO Channels" in "2025 International Conference on Semiconductor Technology for Ultra Large-Scale Integrated Circuits and Thin Film Transistors (ULSIC VS TFT 9)", Yue Kuo, Texas A&M University & National Yang Ming Chiao Tung University Eds, ECI Symposium Series, (2025). https://dc.engconfintl.org/international_conference_on_semiconductor_technology/14