Invited; Microfabrication of BiTeSb thermoelectric devices for applications to IoT sensors
Conference Dates
May 15-18, 2023
Abstract
In this study, thermoelectric power generation devices and an energy harvesting system to generate electricity from a low-quality heat source or environmental temperature fluctuation near room temperature are developed. Thermoelectric power generators (TEG) composed of Bi2Te3-Sb2Te3 with metal nanoparticles are microfabricated using electrodeposition of the thermoelectric materials and microfabrication technology (Figs 1 and 2). Using the fabricated TEG, the temperature-fluctuation thermoelectric power generation (TF-TEG) unit is developed. As shown in Fig. 3, a heat storage material (phase change material: PCM) was contacted to one side of the thermoelectric element, and the other side was made to exchange heat with the outside air.
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Recommended Citation
Takahito Ono, Nguyen Van Toan, and Trung Thi Kim Tuoi, "Invited; Microfabrication of BiTeSb thermoelectric devices for applications to IoT sensors" in "Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC VS TFT 8)", Y. Kuo, Texas A&M University, USA Eds, ECI Symposium Series, (2022). https://dc.engconfintl.org/ulsic_vs_tft_8/42